SemDex 301

Material:	silicon, GaAs, CdTe, glass, SOI, polyamides, photoresis
Application:	Surface measurement
Brand:	Sentronics Metrology
Brochure:

The SemDex 301 inspection system enables semi-automatic measurement of wafer (substrate) layers, flat panels, MEMS chips, and other objects from the wafer/semiconductor market segment. Layer thickness, bow/warp, flatness, and roughness of the wafer can be determined in a single run.

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