SemDex A31/A32

Material:silicon, GaAs, InGaAs, CdTe, glass, tape, adhesives (bo
Application:Wafer evaluation
Brand:Sentronics Metrology
Brochure:Download pdf

SemDex A32 is a fully automated wafer inspection system to evaluate wafer up to 12 (300 mm) at high throughput of more than 60 wafer/ hour. The evaluation omprises thickness (TTV) measurements of substrates (after backgrinding for e.g.) and bow/ warp in one scan. Roughness can be evaluated optionally.

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Product group:Surface Analysis
Application:Surface Analysis
Product:SemDex A31/A32
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SemDex A31/A32 

SemDex A31/A32 SemDex A31/A32 SemDex A31/A32
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